Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658159 | Plasma reactor vessel having improved plasma uniformity comprised of a first electrode, a second electrode opposed to the first electrode, and a third electrode between a substrate carrier and the second electrode | Omid Reza Shojaei, Fabrice Jeanneret | 2020-05-19 |