Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867770 | E-beam apparatus | Sven Antoin Johan Hol, Maarten Frans Janus Kremers, Henricus Martinus Johannes Van De Groes, Niels Johannes Maria Bosch, Marcel Koenraad Marie Baggen | 2020-12-15 |
| 10809634 | Stage system and metrology tool | Marcel Koenraad Marie Baggen, Thomas Jan De Hoog, Sinar Juliana, Henricus Martinus Johannes Van De Groes | 2020-10-20 |