Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622188 | Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun | Laura Dinu-Gürtler | 2020-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622188 | Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun | Laura Dinu-Gürtler | 2020-04-14 |