Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620552 | Stage system, lithographic apparatus and device manufacturing method | Hendrikus Herman Marie Cox, Ronald Cornelis Gerardus Gijzen, Patrick Willem Paul Limpens, Frits Van Der Meulen | 2020-04-14 |