Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10782620 | Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device | Olav Johannes Seijger | 2020-09-22 |
| 10545414 | Vibration isolation system and lithographic apparatus | Ingmar August Kerp, Richardus Simon Antonius Oostveen, Marco Hendrikus Hermanus Oude Nijhuis, Robertus Mathijs Gerardus Rijs, Olav Johannes Seijger +1 more | 2020-01-28 |