Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867819 | Vacuum processing apparatus, vacuum processing system and vacuum processing method | Tamihiro Kobayashi | 2020-12-15 |
| 10707106 | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules | Yukihiro Mori | 2020-07-07 |
| 10630135 | Electric power tool | Hitoshi Sengiku, Hideyuki Goto | 2020-04-21 |