Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732046 | System and method for thermally calibrating semiconductor process chambers | Yen Lin Leow, Caleb Miskin | 2020-08-04 |
| 10643826 | Methods for thermally calibrating reaction chambers | Loren Jacobs, Peter Westrom | 2020-05-05 |