Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854498 | Wafer-supporting device and method for producing same | Hideaki Fukuda | 2020-12-01 |
| 10734219 | Plasma film forming method | — | 2020-08-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854498 | Wafer-supporting device and method for producing same | Hideaki Fukuda | 2020-12-01 |
| 10734219 | Plasma film forming method | — | 2020-08-04 |