Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822695 | Thin film deposition apparatus | Hyun Soo Jang, Jeong Ho Lee, Young-Hoon Kim, Seung Seob Lee, Woo Chan Kim | 2020-11-03 |
| 10714335 | Method of depositing thin film and method of manufacturing semiconductor device | Young-Hoon Kim, Yong Gyu Han, Tae Hee Yoo, Wan Gyu Lim, Jin Geun Yu | 2020-07-14 |
| 10679879 | Substrate processing apparatus | Soo Hyun Kim, Izumi Arai | 2020-06-09 |
| 10662525 | Thin film deposition apparatus | Hyun Soo Jang, Jeong Ho Lee, Young-Hoon Kim, Seung Seob Lee, Woo Chan Kim | 2020-05-26 |