Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837107 | Method and apparatus for contactlessly advancing substrates | Vladimir Kuznetsov | 2020-11-17 |
| 10738382 | Substrate processing apparatus | Pieter Tak | 2020-08-11 |
| 10648078 | Atomic layer deposition apparatus and method for processing substrates using an apparatus | Leilei HU | 2020-05-12 |