Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704146 | Support assembly for substrate backside discoloration control | Shinichi Oki, Yuji Aoki, Peter DEMONTE | 2020-07-07 |
| 10544518 | Chamber components for epitaxial growth apparatus | Shinichi Oki | 2020-01-28 |