Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10583465 | 30 nm in-line LPC testing and cleaning of semiconductor processing equipment | Jianqi Wang, William M. Lu, Kevin A. PAPKE | 2020-03-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10583465 | 30 nm in-line LPC testing and cleaning of semiconductor processing equipment | Jianqi Wang, William M. Lu, Kevin A. PAPKE | 2020-03-10 |