Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679827 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Gopu Krishna, Ravikumar Patil, Hanish Kumar Panavalappil Kumarankutty, Somil KAPADIA | 2020-06-09 |