Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607867 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2020-03-31 |
SN
Saravanakumar Natarajan
Overall (2020): #286,286 of 565,922Top 55%
1
Patents 2020