Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607867 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Saravanakumar Natarajan, Shubham Chourey | 2020-03-31 |
AM
Ananda Seelavanth Math
Overall (2020): #546,721 of 565,922Top 100%
1
Patents 2020