Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10586696 | Halogen abatement for high aspect ratio channel device damage layer removal for EPI growth | Rohit Mishra, Yongjia Li, Minoru Takahashi, Masato Ito, Jinhan Choi | 2020-03-10 |