Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784142 | Lift pin system for wafer handling | Stacia Marcelynas, Riordan Cayabyab | 2020-09-22 |
| 10569299 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jeffrey E. Krampert | 2020-02-25 |