Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788762 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2020-09-29 |