Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10722840 | Methods for treating exhaust gas in a processing system | Mehran Moalem, Daniel O. Clark | 2020-07-28 |
| 10685818 | Plasma abatement technology utilizing water vapor and oxygen reagent | — | 2020-06-16 |
| 10625312 | Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle | — | 2020-04-21 |