Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872778 | Systems and methods utilizing solid-phase etchants | Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle | 2020-12-22 |
| 10755941 | Self-limiting selective etching systems and methods | Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle | 2020-08-25 |
| 10692880 | 3D NAND high aspect ratio structure etch | Zhenjiang Cui, Hanshen Zhang, Zhijun Chen, Nitin K. Ingle | 2020-06-23 |
| 10615047 | Systems and methods to form airgaps | Zhijun Chen, Lin Xu | 2020-04-07 |