Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10814457 | Gimbal for CMP tool conditioning disk having flexible metal diaphragm | Sunghoon Lee, Sung Pyo Jung, Eric J. Bodensieck, Dinesh R. Koli | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10814457 | Gimbal for CMP tool conditioning disk having flexible metal diaphragm | Sunghoon Lee, Sung Pyo Jung, Eric J. Bodensieck, Dinesh R. Koli | 2020-10-27 |