Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796935 | Electronic device manufacturing systems, methods, and apparatus for heating substrates and reducing contamination in loadlocks | Edward Ng, Andrew Nguyen | 2020-10-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796935 | Electronic device manufacturing systems, methods, and apparatus for heating substrates and reducing contamination in loadlocks | Edward Ng, Andrew Nguyen | 2020-10-06 |