Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788806 | Initializing individual exposure field parameters of an overlay controller | Eyup Cinar | 2020-09-29 |
| 10754319 | Across-wafer profile control in semiconductor processes | Dinesh Balasubra Manian, Houssam Lazkani | 2020-08-25 |