Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755901 | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces | John Chambers, Yuping Lin, Herb Johnson | 2020-08-25 |
| 10586685 | Hollow cathode plasma source | Thomas Biquet, John Chambers, Hughes Wiame | 2020-03-10 |
| 10580624 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | — | 2020-03-03 |
| 10580625 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | — | 2020-03-03 |
| 10573499 | Method of extracting and accelerating ions | John Chambers | 2020-02-25 |
| 10559452 | Plasma device driven by multiple-phase alternating or pulsed electrical current | John Chambers | 2020-02-11 |