Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573491 | Device, manufacturing method, and exposure apparatus | Akio Yamada, Shinji Sugatani, Masaki Kurokawa, Masahiro Takizawa | 2020-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573491 | Device, manufacturing method, and exposure apparatus | Akio Yamada, Shinji Sugatani, Masaki Kurokawa, Masahiro Takizawa | 2020-02-25 |