Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804821 | Apparatus and method for monitoring the relative relationship between the wafer and the chuck | Te-Min Wang, Chun-Chieh Lin, Chien-Chung Hou, Cheng-Mao Chien | 2020-10-13 |
| 10699876 | Method of cleaning electrostatic chuck | Chun-Chin Kang, Chieh-Jen Yang | 2020-06-30 |