Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816901 | Coater with automatic cleaning function and coater automatic cleaning method | Hui Wang, Wenjun Wang, Hongchao Yang, Voha Nuch, Fufa Chen +3 more | 2020-10-27 |
| 10770315 | Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus | Zhenming Chu, Xi Wang, Hui Wang, Shena Jia, Jun Wu +1 more | 2020-09-08 |
| 10770335 | Substrate supporting apparatus | Fufa Chen, Zhiyou Fang, Jun Wu, Hui Wang, Wenjun Wang | 2020-09-08 |