Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490390 | Substrate processing device | Tetsushi Fujinaga, Atsuhito Ihori, Masahiro Matsumoto, Noriaki Tani, Harunori Iwai +1 more | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490390 | Substrate processing device | Tetsushi Fujinaga, Atsuhito Ihori, Masahiro Matsumoto, Noriaki Tani, Harunori Iwai +1 more | 2019-11-26 |