Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490390 | Substrate processing device | Tetsushi Fujinaga, Atsuhito Ihori, Masahiro Matsumoto, Noriaki Tani, Kenji Iwata +1 more | 2019-11-26 |
| 10370757 | Thin substrate processing device | Tetsushi Fujinaga, Masahiro Matsumoto, Makoto Arai, Eriko Mase, Koji Takahashi +1 more | 2019-08-06 |