Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378097 | Film forming apparatus | Shota Matsuda, Hiromichi Nakata, Yoji Sato, Kazutaka Tachibana, Daiki Tsuboi | 2019-08-13 |
| 10246771 | Film forming method and plasma chemical vapor deposition apparatus | Kazutaka Tachibana, Yoji Sato, Hiromichi Nakata, Kazuyoshi MANABE, Seiji Okamura +1 more | 2019-04-02 |