Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10246771 | Film forming method and plasma chemical vapor deposition apparatus | Kazutaka Tachibana, Takayasu Sato, Yoji Sato, Hiromichi Nakata, Kazuyoshi MANABE +1 more | 2019-04-02 |