Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522386 | Susceptor and method for manufacturing same | Yoshihisa Abe, Satoru Nogami | 2019-12-31 |
| 10388536 | Etching method for SiC substrate and holding container | Satoshi Torimi, Youji Teramoto, Norihito Yabuki, Satoru Nogami, Tadaaki Kaneko +2 more | 2019-08-20 |