Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508361 | Method for manufacturing semiconductor wafer | Yasunori Kutsuma, Koji Ashida | 2019-12-17 |
| 10388536 | Etching method for SiC substrate and holding container | Satoshi Torimi, Masato Shinohara, Youji Teramoto, Norihito Yabuki, Satoru Nogami +2 more | 2019-08-20 |