Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373853 | Electrostatic chuck and wafer processing apparatus | Kazuki Anada | 2019-08-06 |
| 10373854 | Electrostatic chuck | Jumpei UEFUJI, Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Tetsuro ITOYAMA | 2019-08-06 |