Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373854 | Electrostatic chuck | Jumpei UEFUJI, Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii | 2019-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373854 | Electrostatic chuck | Jumpei UEFUJI, Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii | 2019-08-06 |