YM

Yukie Minekawa

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #205,227 of 560,194Top 40%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10274843 Exposure apparatus, exposure method and storage medium Seiji Nagahara, Masaru Tomono, Nobutaka Fukunaga, Gousuke Shiraishi 2019-04-30