Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459339 | Resist pattern forming method, coating and developing apparatus and storage medium | Tetsuo Fukuoka, Yoshio Kimura | 2019-10-29 |
| 10274843 | Exposure apparatus, exposure method and storage medium | Seiji Nagahara, Masaru Tomono, Nobutaka Fukunaga, Yukie Minekawa | 2019-04-30 |