Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410902 | Plasma processing apparatus | Akihito Fushimi | 2019-09-10 |
| 10388558 | Plasma processing apparatus | Akira Ishikawa, Ryo CHIBA | 2019-08-20 |
| 10269607 | Electrostatic chucking method and substrate processing apparatus | Taketoshi TOMIOKA, Hiroki Kishi, Jisoo SUH | 2019-04-23 |