Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269607 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Jisoo SUH | 2019-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269607 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Jisoo SUH | 2019-04-23 |