HK

Hiroki Kishi

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #445,658 of 560,194Top 80%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10269607 Electrostatic chucking method and substrate processing apparatus Yasuharu Sasaki, Taketoshi TOMIOKA, Jisoo SUH 2019-04-23