Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10248030 | Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus | Yuichiro KUNUGIMOTO, Takafumi Hayama, Keishi Hamada | 2019-04-02 |
| 10211050 | Method for photo-lithographic processing in semiconductor device manufacturing | Hidetami Yaegashi, Kenichi Oyama, Masatoshi Yamato, Tomohiro Iseki | 2019-02-19 |