Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10248030 | Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus | Toyohisa Tsuruda, Yuichiro KUNUGIMOTO, Takafumi Hayama | 2019-04-02 |