Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410877 | Etching method | Ryuichi TAKASHIMA, Yoshinobu Ooya | 2019-09-10 |
| 10361070 | Method of processing target object | Jin Kudo | 2019-07-23 |
| 10304691 | Method of etching silicon oxide and silicon nitride selectively against each other | Sho Tominaga | 2019-05-28 |