Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381237 | Etching method | Ryohei TAKEDA, Yoshinobu Ooya | 2019-08-13 |
| 10304691 | Method of etching silicon oxide and silicon nitride selectively against each other | Taku Gohira | 2019-05-28 |