Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388524 | Film forming method, boron film, and film forming apparatus | Hirokazu Ueda, Masahiro Oka, Hiraku Ishikawa, Yoshimasa Watanabe | 2019-08-20 |
| 10381233 | Method and apparatus for substrate processing | Koji Kagawa, Kazuya Dobashi, Toshihide Takashima, Masaru Amai | 2019-08-13 |