Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388524 | Film forming method, boron film, and film forming apparatus | Masahiro Oka, Hiraku Ishikawa, Yoshimasa Watanabe, Syuhei Yonezawa | 2019-08-20 |
| 10249498 | Method for using heated substrates for process chemistry control | Peter L. G. Ventzek | 2019-04-02 |