Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10264630 | Plasma processing apparatus and method for processing object | Ryoichi Yoshida, Hiraku MURAKAMI | 2019-04-16 |
| 10249478 | Substrate processing apparatus | Takashi Kitazawa, Akihiro Yoshimura | 2019-04-02 |