Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468268 | Etching method | — | 2019-11-05 |
| 10264630 | Plasma processing apparatus and method for processing object | Hiraku MURAKAMI, Nobutaka SASAKI | 2019-04-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468268 | Etching method | — | 2019-11-05 |
| 10264630 | Plasma processing apparatus and method for processing object | Hiraku MURAKAMI, Nobutaka SASAKI | 2019-04-16 |