Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10316410 | Method of filling recesses in substrate with tungsten | Katsumasa Yamaguchi | 2019-06-11 |
| 10256101 | Raw material gas supply apparatus, raw material gas supply method and storage medium | Hironori Yagi, Atsunari Matsuyama | 2019-04-09 |
| 10221478 | Film formation device | Daisuke Toriya, Kentaro Asakura, Seishi Murakami | 2019-03-05 |