HY

Hironori Yagi

TL Tokyo Electron Limited: 2 patents #91 of 763Top 15%
Overall (2019): #166,665 of 560,194Top 30%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10385457 Raw material gas supply apparatus, raw material gas supply method and storage medium Masayuki Moroi 2019-08-20
10256101 Raw material gas supply apparatus, raw material gas supply method and storage medium Kensaku Narushima, Atsunari Matsuyama 2019-04-09