Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497540 | Compensated location specific processing apparatus and method | Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Michael Graf | 2019-12-03 |
| 10256095 | Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system | Soo Doo Chae, Noel Russell, Joshua LaRose, Nicholas Joy, Luis Fernandez +3 more | 2019-04-09 |